Cycle 120:C:\Messungen\Sebastian Benz\20210907_Iod\Temp20210907_SBenz.117.Ta-At-3.1_1.pro:1:8:20210907_SBenz.Ta-At-3.1:O 1s 11
	Characteristic Energy eV	1.486600e+003	Acquisition Time s	6.000000e+000
Name		O 1s	O 1s	
Position		531.68	530.66	
FWHM		2.30	1.41	
Area		1116.99	2290.55	
Lineshape		GL(30)	GL(30)	
K.E.	Counts	O 1s	O 1s	Background	Envelope		B.E.	CPS	O 1s	O 1s	Background CPS	Envelope CPS
9.432000e+002	1.230700e+004	1.230700e+004	1.230700e+004	1.230700e+004	1.230700e+004		5.434000e+002	2.051167e+003	2.051167e+003	2.051167e+003	2.051167e+003	2.051167e+003
9.434000e+002	1.186600e+004	1.186600e+004	1.186600e+004	1.186600e+004	1.186600e+004		5.432000e+002	1.977667e+003	1.977667e+003	1.977667e+003	1.977667e+003	1.977667e+003
9.436000e+002	1.220500e+004	1.220500e+004	1.220500e+004	1.220500e+004	1.220500e+004		5.430000e+002	2.034167e+003	2.034167e+003	2.034167e+003	2.034167e+003	2.034167e+003
9.438000e+002	1.208200e+004	1.208200e+004	1.208200e+004	1.208200e+004	1.208200e+004		5.428000e+002	2.013667e+003	2.013667e+003	2.013667e+003	2.013667e+003	2.013667e+003
9.440000e+002	1.195900e+004	1.195900e+004	1.195900e+004	1.195900e+004	1.195900e+004		5.426000e+002	1.993167e+003	1.993167e+003	1.993167e+003	1.993167e+003	1.993167e+003
9.442000e+002	1.190600e+004	1.190600e+004	1.190600e+004	1.190600e+004	1.190600e+004		5.424000e+002	1.984333e+003	1.984333e+003	1.984333e+003	1.984333e+003	1.984333e+003
9.444000e+002	1.180600e+004	1.180600e+004	1.180600e+004	1.180600e+004	1.180600e+004		5.422000e+002	1.967667e+003	1.967667e+003	1.967667e+003	1.967667e+003	1.967667e+003
9.446000e+002	1.200400e+004	1.200400e+004	1.200400e+004	1.200400e+004	1.200400e+004		5.420000e+002	2.000667e+003	2.000667e+003	2.000667e+003	2.000667e+003	2.000667e+003
9.448000e+002	1.192500e+004	1.192500e+004	1.192500e+004	1.192500e+004	1.192500e+004		5.418000e+002	1.987500e+003	1.987500e+003	1.987500e+003	1.987500e+003	1.987500e+003
9.450000e+002	1.201300e+004	1.201300e+004	1.201300e+004	1.201300e+004	1.201300e+004		5.416000e+002	2.002167e+003	2.002167e+003	2.002167e+003	2.002167e+003	2.002167e+003
9.452000e+002	1.192700e+004	1.192700e+004	1.192700e+004	1.192700e+004	1.192700e+004		5.414000e+002	1.987833e+003	1.987833e+003	1.987833e+003	1.987833e+003	1.987833e+003
9.454000e+002	1.199200e+004	1.199200e+004	1.199200e+004	1.199200e+004	1.199200e+004		5.412000e+002	1.998667e+003	1.998667e+003	1.998667e+003	1.998667e+003	1.998667e+003
9.456000e+002	1.203600e+004	1.203600e+004	1.203600e+004	1.203600e+004	1.203600e+004		5.410000e+002	2.006000e+003	2.006000e+003	2.006000e+003	2.006000e+003	2.006000e+003
9.458000e+002	1.162200e+004	1.162200e+004	1.162200e+004	1.162200e+004	1.162200e+004		5.408000e+002	1.937000e+003	1.937000e+003	1.937000e+003	1.937000e+003	1.937000e+003
9.460000e+002	1.189500e+004	1.189500e+004	1.189500e+004	1.189500e+004	1.189500e+004		5.406000e+002	1.982500e+003	1.982500e+003	1.982500e+003	1.982500e+003	1.982500e+003
9.462000e+002	1.194100e+004	1.194100e+004	1.194100e+004	1.194100e+004	1.194100e+004		5.404000e+002	1.990167e+003	1.990167e+003	1.990167e+003	1.990167e+003	1.990167e+003
9.464000e+002	1.215600e+004	1.215600e+004	1.215600e+004	1.215600e+004	1.215600e+004		5.402000e+002	2.026000e+003	2.026000e+003	2.026000e+003	2.026000e+003	2.026000e+003
9.466000e+002	1.192200e+004	1.192200e+004	1.192200e+004	1.192200e+004	1.192200e+004		5.400000e+002	1.987000e+003	1.987000e+003	1.987000e+003	1.987000e+003	1.987000e+003
9.468000e+002	1.197500e+004	1.197500e+004	1.197500e+004	1.197500e+004	1.197500e+004		5.398000e+002	1.995833e+003	1.995833e+003	1.995833e+003	1.995833e+003	1.995833e+003
9.470000e+002	1.193200e+004	1.193200e+004	1.193200e+004	1.193200e+004	1.193200e+004		5.396000e+002	1.988667e+003	1.988667e+003	1.988667e+003	1.988667e+003	1.988667e+003
9.472000e+002	1.179900e+004	1.179900e+004	1.179900e+004	1.179900e+004	1.179900e+004		5.394000e+002	1.966500e+003	1.966500e+003	1.966500e+003	1.966500e+003	1.966500e+003
9.474000e+002	1.185900e+004	1.185900e+004	1.185900e+004	1.185900e+004	1.185900e+004		5.392000e+002	1.976500e+003	1.976500e+003	1.976500e+003	1.976500e+003	1.976500e+003
9.476000e+002	1.186400e+004	1.186400e+004	1.186400e+004	1.186400e+004	1.186400e+004		5.390000e+002	1.977333e+003	1.977333e+003	1.977333e+003	1.977333e+003	1.977333e+003
9.478000e+002	1.167600e+004	1.167600e+004	1.167600e+004	1.167600e+004	1.167600e+004		5.388000e+002	1.946000e+003	1.946000e+003	1.946000e+003	1.946000e+003	1.946000e+003
9.480000e+002	1.178800e+004	1.178800e+004	1.178800e+004	1.178800e+004	1.178800e+004		5.386000e+002	1.964667e+003	1.964667e+003	1.964667e+003	1.964667e+003	1.964667e+003
9.482000e+002	1.206800e+004	1.206800e+004	1.206800e+004	1.206800e+004	1.206800e+004		5.384000e+002	2.011333e+003	2.011333e+003	2.011333e+003	2.011333e+003	2.011333e+003
9.484000e+002	1.206800e+004	1.206800e+004	1.206800e+004	1.206800e+004	1.206800e+004		5.382000e+002	2.011333e+003	2.011333e+003	2.011333e+003	2.011333e+003	2.011333e+003
9.486000e+002	1.188500e+004	1.188500e+004	1.188500e+004	1.188500e+004	1.188500e+004		5.380000e+002	1.980833e+003	1.980833e+003	1.980833e+003	1.980833e+003	1.980833e+003
9.488000e+002	1.200000e+004	1.200000e+004	1.200000e+004	1.200000e+004	1.200000e+004		5.378000e+002	2.000000e+003	2.000000e+003	2.000000e+003	2.000000e+003	2.000000e+003
9.490000e+002	1.173200e+004	1.173200e+004	1.173200e+004	1.173200e+004	1.173200e+004		5.376000e+002	1.955333e+003	1.955334e+003	1.955333e+003	1.955333e+003	1.955334e+003
9.492000e+002	1.184100e+004	1.184101e+004	1.184100e+004	1.184100e+004	1.184101e+004		5.374000e+002	1.973500e+003	1.973501e+003	1.973500e+003	1.973500e+003	1.973501e+003
9.494000e+002	1.170800e+004	1.170801e+004	1.170800e+004	1.170800e+004	1.170801e+004		5.372000e+002	1.951333e+003	1.951335e+003	1.951333e+003	1.951333e+003	1.951335e+003
9.496000e+002	1.187700e+004	1.187703e+004	1.187700e+004	1.187700e+004	1.187703e+004		5.370000e+002	1.979500e+003	1.979505e+003	1.979500e+003	1.979500e+003	1.979505e+003
9.498000e+002	1.175600e+004	1.175606e+004	1.175600e+004	1.175600e+004	1.175606e+004		5.368000e+002	1.959333e+003	1.959343e+003	1.959333e+003	1.959333e+003	1.959343e+003
9.500000e+002	1.204100e+004	1.204112e+004	1.204100e+004	1.204100e+004	1.204112e+004		5.366000e+002	2.006833e+003	2.006854e+003	2.006833e+003	2.006833e+003	2.006854e+003
9.502000e+002	1.183100e+004	1.183126e+004	1.183100e+004	1.183100e+004	1.183126e+004		5.364000e+002	1.971833e+003	1.971876e+003	1.971833e+003	1.971833e+003	1.971876e+003
9.504000e+002	1.159100e+004	1.159151e+004	1.159100e+004	1.159100e+004	1.159151e+004		5.362000e+002	1.931833e+003	1.931919e+003	1.931833e+003	1.931833e+003	1.931919e+003
9.506000e+002	1.178300e+004	1.178400e+004	1.178300e+004	1.178300e+004	1.178400e+004		5.360000e+002	1.963833e+003	1.964000e+003	1.963833e+003	1.963833e+003	1.964000e+003
9.508000e+002	1.184100e+004	1.184291e+004	1.184100e+004	1.184100e+004	1.184291e+004		5.358000e+002	1.973500e+003	1.973818e+003	1.973500e+003	1.973500e+003	1.973818e+003
9.510000e+002	1.200000e+004	1.200355e+004	1.200000e+004	1.200000e+004	1.200355e+004		5.356000e+002	2.000000e+003	2.000591e+003	2.000000e+003	2.000000e+003	2.000591e+003
9.512000e+002	1.184400e+004	1.185042e+004	1.184400e+004	1.184400e+004	1.185042e+004		5.354000e+002	1.974000e+003	1.975070e+003	1.974000e+003	1.974000e+003	1.975070e+003
9.514000e+002	1.195300e+004	1.196336e+004	1.195200e+004	1.195200e+004	1.196336e+004		5.352000e+002	1.992167e+003	1.993894e+003	1.991999e+003	1.991999e+003	1.993894e+003
9.516000e+002	1.205900e+004	1.197125e+004	1.195163e+004	1.195163e+004	1.197125e+004		5.350000e+002	2.009833e+003	1.995209e+003	1.991938e+003	1.991938e+003	1.995209e+003
9.518000e+002	1.190900e+004	1.198444e+004	1.195149e+004	1.195149e+004	1.198444e+004		5.348000e+002	1.984833e+003	1.997407e+003	1.991914e+003	1.991914e+003	1.997407e+003
9.520000e+002	1.211400e+004	1.200506e+004	1.195093e+004	1.195093e+004	1.200506e+004		5.346000e+002	2.019000e+003	2.000843e+003	1.991822e+003	1.991822e+003	2.000844e+003
9.522000e+002	1.194900e+004	1.203754e+004	1.195093e+004	1.195092e+004	1.203754e+004		5.344000e+002	1.991500e+003	2.006257e+003	1.991821e+003	1.991820e+003	2.006257e+003
9.524000e+002	1.208800e+004	1.208531e+004	1.195047e+004	1.195045e+004	1.208532e+004		5.342000e+002	2.014667e+003	2.014218e+003	1.991744e+003	1.991742e+003	2.014221e+003
9.526000e+002	1.247300e+004	1.215370e+004	1.194872e+004	1.194866e+004	1.215376e+004		5.340000e+002	2.078833e+003	2.025617e+003	1.991453e+003	1.991444e+003	2.025626e+003
9.528000e+002	1.241200e+004	1.225040e+004	1.194727e+004	1.194708e+004	1.225059e+004		5.338000e+002	2.068667e+003	2.041734e+003	1.991211e+003	1.991180e+003	2.041765e+003
9.530000e+002	1.258900e+004	1.238105e+004	1.194551e+004	1.194488e+004	1.238168e+004		5.336000e+002	2.098167e+003	2.063509e+003	1.990918e+003	1.990813e+003	2.063614e+003
9.532000e+002	1.227700e+004	1.255437e+004	1.194571e+004	1.194374e+004	1.255634e+004		5.334000e+002	2.046167e+003	2.092395e+003	1.990951e+003	1.990624e+003	2.092723e+003
9.534000e+002	1.271600e+004	1.277061e+004	1.194686e+004	1.194110e+004	1.277637e+004		5.332000e+002	2.119333e+003	2.128436e+003	1.991143e+003	1.990183e+003	2.129395e+003
9.536000e+002	1.316700e+004	1.302893e+004	1.195264e+004	1.193690e+004	1.304467e+004		5.330000e+002	2.194500e+003	2.171488e+003	1.992107e+003	1.989484e+003	2.174111e+003
9.538000e+002	1.326700e+004	1.332444e+004	1.197274e+004	1.193235e+004	1.336483e+004		5.328000e+002	2.211167e+003	2.220741e+003	1.995456e+003	1.988725e+003	2.227472e+003
9.540000e+002	1.369900e+004	1.363979e+004	1.202287e+004	1.192630e+004	1.373635e+004		5.326000e+002	2.283167e+003	2.273298e+003	2.003811e+003	1.987717e+003	2.289392e+003
9.542000e+002	1.424200e+004	1.395117e+004	1.213521e+004	1.191838e+004	1.416801e+004		5.324000e+002	2.373667e+003	2.325196e+003	2.022536e+003	1.986396e+003	2.361335e+003
9.544000e+002	1.457200e+004	1.422765e+004	1.236250e+004	1.190929e+004	1.468086e+004		5.322000e+002	2.428667e+003	2.371275e+003	2.060416e+003	1.984882e+003	2.446809e+003
9.546000e+002	1.528300e+004	1.443566e+004	1.278385e+004	1.189774e+004	1.532177e+004		5.320000e+002	2.547167e+003	2.405943e+003	2.130642e+003	1.982957e+003	2.553628e+003
9.548000e+002	1.614000e+004	1.454666e+004	1.349177e+004	1.188322e+004	1.615521e+004		5.318000e+002	2.690000e+003	2.424443e+003	2.248629e+003	1.980537e+003	2.692534e+003
9.550000e+002	1.730800e+004	1.453853e+004	1.457227e+004	1.186465e+004	1.724615e+004		5.316000e+002	2.884667e+003	2.423089e+003	2.428711e+003	1.977442e+003	2.874358e+003
9.552000e+002	1.871500e+004	1.441219e+004	1.603593e+004	1.184120e+004	1.860692e+004		5.314000e+002	3.119167e+003	2.402031e+003	2.672655e+003	1.973533e+003	3.101153e+003
9.554000e+002	2.027700e+004	1.418131e+004	1.774928e+004	1.181232e+004	2.011826e+004		5.312000e+002	3.379500e+003	2.363551e+003	2.958213e+003	1.968720e+003	3.353044e+003
9.556000e+002	2.131700e+004	1.387279e+004	1.938433e+004	1.177979e+004	2.147734e+004		5.310000e+002	3.552833e+003	2.312132e+003	3.230721e+003	1.963298e+003	3.579556e+003
9.558000e+002	2.215200e+004	1.352225e+004	2.048218e+004	1.174428e+004	2.226015e+004		5.308000e+002	3.692000e+003	2.253708e+003	3.413697e+003	1.957380e+003	3.710026e+003
9.560000e+002	2.185000e+004	1.316444e+004	2.065695e+004	1.170968e+004	2.211171e+004		5.306000e+002	3.641667e+003	2.194073e+003	3.442826e+003	1.951614e+003	3.685285e+003
9.562000e+002	2.150100e+004	1.282554e+004	1.983780e+004	1.167617e+004	2.098717e+004		5.304000e+002	3.583500e+003	2.137589e+003	3.306300e+003	1.946028e+003	3.497861e+003
9.564000e+002	1.901300e+004	1.252937e+004	1.830520e+004	1.165105e+004	1.918352e+004		5.302000e+002	3.168833e+003	2.088228e+003	3.050867e+003	1.941842e+003	3.197253e+003
9.566000e+002	1.718100e+004	1.228231e+004	1.652397e+004	1.163212e+004	1.717416e+004		5.300000e+002	2.863500e+003	2.047051e+003	2.753995e+003	1.938687e+003	2.862360e+003
9.568000e+002	1.554800e+004	1.208643e+004	1.489251e+004	1.161872e+004	1.536023e+004		5.298000e+002	2.591333e+003	2.014405e+003	2.482086e+003	1.936453e+003	2.560038e+003
9.570000e+002	1.375500e+004	1.193815e+004	1.362140e+004	1.161140e+004	1.394814e+004		5.296000e+002	2.292500e+003	1.989691e+003	2.270233e+003	1.935234e+003	2.324691e+003
9.572000e+002	1.278400e+004	1.182931e+004	1.274911e+004	1.160739e+004	1.297103e+004		5.294000e+002	2.130667e+003	1.971551e+003	2.124852e+003	1.934565e+003	2.161838e+003
9.574000e+002	1.227300e+004	1.175214e+004	1.220694e+004	1.160511e+004	1.235397e+004		5.292000e+002	2.045500e+003	1.958690e+003	2.034490e+003	1.934185e+003	2.058996e+003
9.576000e+002	1.185100e+004	1.169904e+004	1.190008e+004	1.160427e+004	1.199485e+004		5.290000e+002	1.975167e+003	1.949839e+003	1.983347e+003	1.934045e+003	1.999142e+003
9.578000e+002	1.193200e+004	1.166263e+004	1.173889e+004	1.160315e+004	1.179838e+004		5.288000e+002	1.988667e+003	1.943772e+003	1.956482e+003	1.933858e+003	1.966396e+003
9.580000e+002	1.182100e+004	1.163890e+004	1.166058e+004	1.160240e+004	1.169708e+004		5.286000e+002	1.970167e+003	1.939817e+003	1.943431e+003	1.933733e+003	1.949514e+003
9.582000e+002	1.158800e+004	1.162414e+004	1.162572e+004	1.160235e+004	1.164751e+004		5.284000e+002	1.931333e+003	1.937357e+003	1.937620e+003	1.933725e+003	1.941252e+003
9.584000e+002	1.159700e+004	1.161501e+004	1.161108e+004	1.160233e+004	1.162376e+004		5.282000e+002	1.932833e+003	1.935835e+003	1.935181e+003	1.933722e+003	1.937294e+003
9.586000e+002	1.162200e+004	1.162922e+004	1.162508e+004	1.162200e+004	1.163230e+004		5.280000e+002	1.937000e+003	1.938203e+003	1.937513e+003	1.937000e+003	1.938717e+003
9.588000e+002	1.165100e+004	1.165500e+004	1.165201e+004	1.165100e+004	1.165600e+004		5.278000e+002	1.941833e+003	1.942500e+003	1.942001e+003	1.941833e+003	1.942667e+003
9.590000e+002	1.156400e+004	1.156616e+004	1.156431e+004	1.156400e+004	1.156647e+004		5.276000e+002	1.927333e+003	1.927693e+003	1.927385e+003	1.927333e+003	1.927745e+003
9.592000e+002	1.149300e+004	1.149414e+004	1.149309e+004	1.149300e+004	1.149423e+004		5.274000e+002	1.915500e+003	1.915690e+003	1.915515e+003	1.915500e+003	1.915705e+003
9.594000e+002	1.160400e+004	1.160459e+004	1.160402e+004	1.160400e+004	1.160461e+004		5.272000e+002	1.934000e+003	1.934098e+003	1.934004e+003	1.934000e+003	1.934102e+003
9.596000e+002	1.167000e+004	1.167029e+004	1.167001e+004	1.167000e+004	1.167030e+004		5.270000e+002	1.945000e+003	1.945049e+003	1.945001e+003	1.945000e+003	1.945050e+003
9.598000e+002	1.161900e+004	1.161914e+004	1.161900e+004	1.161900e+004	1.161915e+004		5.268000e+002	1.936500e+003	1.936524e+003	1.936500e+003	1.936500e+003	1.936524e+003
9.600000e+002	1.166200e+004	1.166207e+004	1.166200e+004	1.166200e+004	1.166207e+004		5.266000e+002	1.943667e+003	1.943678e+003	1.943667e+003	1.943667e+003	1.943678e+003
9.602000e+002	1.149100e+004	1.149103e+004	1.149100e+004	1.149100e+004	1.149103e+004		5.264000e+002	1.915167e+003	1.915172e+003	1.915167e+003	1.915167e+003	1.915172e+003
9.604000e+002	1.157100e+004	1.157101e+004	1.157100e+004	1.157100e+004	1.157101e+004		5.262000e+002	1.928500e+003	1.928502e+003	1.928500e+003	1.928500e+003	1.928502e+003
9.606000e+002	1.138100e+004	1.138101e+004	1.138100e+004	1.138100e+004	1.138101e+004		5.260000e+002	1.896833e+003	1.896834e+003	1.896833e+003	1.896833e+003	1.896834e+003
9.608000e+002	1.169100e+004	1.169100e+004	1.169100e+004	1.169100e+004	1.169100e+004		5.258000e+002	1.948500e+003	1.948500e+003	1.948500e+003	1.948500e+003	1.948500e+003
9.610000e+002	1.150700e+004	1.150700e+004	1.150700e+004	1.150700e+004	1.150700e+004		5.256000e+002	1.917833e+003	1.917834e+003	1.917833e+003	1.917833e+003	1.917834e+003
9.612000e+002	1.145400e+004	1.145400e+004	1.145400e+004	1.145400e+004	1.145400e+004		5.254000e+002	1.909000e+003	1.909000e+003	1.909000e+003	1.909000e+003	1.909000e+003
9.614000e+002	1.154900e+004	1.154900e+004	1.154900e+004	1.154900e+004	1.154900e+004		5.252000e+002	1.924833e+003	1.924833e+003	1.924833e+003	1.924833e+003	1.924833e+003
9.616000e+002	1.150100e+004	1.150100e+004	1.150100e+004	1.150100e+004	1.150100e+004		5.250000e+002	1.916833e+003	1.916833e+003	1.916833e+003	1.916833e+003	1.916833e+003
9.618000e+002	1.144300e+004	1.144300e+004	1.144300e+004	1.144300e+004	1.144300e+004		5.248000e+002	1.907167e+003	1.907167e+003	1.907167e+003	1.907167e+003	1.907167e+003
9.620000e+002	1.155500e+004	1.155500e+004	1.155500e+004	1.155500e+004	1.155500e+004		5.246000e+002	1.925833e+003	1.925833e+003	1.925833e+003	1.925833e+003	1.925833e+003
9.622000e+002	1.150000e+004	1.150000e+004	1.150000e+004	1.150000e+004	1.150000e+004		5.244000e+002	1.916667e+003	1.916667e+003	1.916667e+003	1.916667e+003	1.916667e+003
9.624000e+002	1.158800e+004	1.158800e+004	1.158800e+004	1.158800e+004	1.158800e+004		5.242000e+002	1.931333e+003	1.931333e+003	1.931333e+003	1.931333e+003	1.931333e+003
9.626000e+002	1.152100e+004	1.152100e+004	1.152100e+004	1.152100e+004	1.152100e+004		5.240000e+002	1.920167e+003	1.920167e+003	1.920167e+003	1.920167e+003	1.920167e+003
9.628000e+002	1.142400e+004	1.142400e+004	1.142400e+004	1.142400e+004	1.142400e+004		5.238000e+002	1.904000e+003	1.904000e+003	1.904000e+003	1.904000e+003	1.904000e+003
9.630000e+002	1.160700e+004	1.160700e+004	1.160700e+004	1.160700e+004	1.160700e+004		5.236000e+002	1.934500e+003	1.934500e+003	1.934500e+003	1.934500e+003	1.934500e+003
9.632000e+002	1.158400e+004	1.158400e+004	1.158400e+004	1.158400e+004	1.158400e+004		5.234000e+002	1.930667e+003	1.930667e+003	1.930667e+003	1.930667e+003	1.930667e+003
